Microchannel fabrication in PMMA based on localized heating using high-repetition rate femtosecond pulses

Daniel Day; Min Gu

doi:10.1117/12.638336

28 December 2005 Microchannel fabrication in PMMA based on localized heating using high-repetition rate femtosecond pulses

Daniel Day, Min Gu

Author Affiliations +

Proceedings Volume 6037, Device and Process Technologies for Microelectronics, MEMS, and Photonics IV; 603704 (2005) https://doi.org/10.1117/12.638336
Event: Microelectronics, MEMS, and Nanotechnology, 2005, Brisbane, Australia

Abstract

Femtosecond laser pulses with energy of 0.9 nJ per pulse and a 80 MHz repetition rate at a wavelength of 750 nm were used to fabricate straight microchannels in a PMMA substrate. The size and shape of the microchannels can be controlled by changing the fabrication parameters of speed, the number of fabrication repeats and delay in-between fabrication repeats. It has been proposed that the absorption of energy in the focal region modifies the density of the polymer matrix, which after annealing the sample above the glass transition temperature results in the formation of the microchannels. Diffusion of heat through the substrate is a uniform process which has the effect of creating symmetrically shaped channels. This fabrication method is expected to have applications in the fabrication of microstructures or microfluidic devices in polymer substrates.

Citation Download Citation

Daniel Day and Min Gu "Microchannel fabrication in PMMA based on localized heating using high-repetition rate femtosecond pulses", Proc. SPIE 6037, Device and Process Technologies for Microelectronics, MEMS, and Photonics IV, 603704 (28 December 2005); https://doi.org/10.1117/12.638336

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