Substrate aware OPC rules for edge effect in block levels

Dongbing Shao; Todd C. Bailey; Ian Stobert; Irene Popova; Chan Sam Chang

doi:10.1117/12.865134

24 September 2010 Substrate aware OPC rules for edge effect in block levels

Dongbing Shao, Todd C. Bailey, Ian Stobert, Irene Popova, Chan Sam Chang

Proceedings Volume 7823, Photomask Technology 2010; 78233U (2010) https://doi.org/10.1117/12.865134
Event: SPIE Photomask Technology, 2010, Monterey, California, United States

Abstract

Implant level photolithography processes are becoming more challenging each node due to everdecreasing CD and resist edge placement requirements, and the technical challenge is exacerbated by the business need to develop and maintain low-cost processes. Optical Proximity Correction (OPC) using models created based on data from plain silicon substrate is not able to accommodate the various real device/design scenarios due to substrate pattern effects. In this paper, we show our systematic study on substrate effect (RX/STI) on implant level lithography CD printing. We also explain the CD variation mechanism and validate by simulation using well calibrated physical resist model. Based on the results, we propose an approach to generate substrate-aware OPC rules to correct for such substrate effects.

Citation Download Citation

Dongbing Shao, Todd C. Bailey, Ian Stobert, Irene Popova, and Chan Sam Chang "Substrate aware OPC rules for edge effect in block levels", Proc. SPIE 7823, Photomask Technology 2010, 78233U (24 September 2010); https://doi.org/10.1117/12.865134

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available