Defect classification for the inspection of TFT LCD glass

DaeCheol Lim; Dae-Gyu Seo; DaeHwa Jeong

doi:10.1117/12.639878

6 December 2005 Defect classification for the inspection of TFT LCD glass

DaeCheol Lim, Dae-Gyu Seo, DaeHwa Jeong

Proceedings Volume 6051, Optomechatronic Machine Vision; 60510F (2005) https://doi.org/10.1117/12.639878
Event: Optomechatronic Technologies 2005, 2005, Sapporo, Japan

Abstract

Serious pattern defects and particles co-exist on the glass and only a few defects can cause serious quality problem. Now, if there would be a way to classify the defect by its potential lethality, it would be useful to control the product quality and loss of review time. This paper presents a method to classify the defect by using reviewing images. First, several defect types were investigated to develop an algorithm. In next, efficiency of the algorithm was verified in a plant. The result was good enough to utilize the information of classified defect type. Finally, the algorithm was applied to remove the information of trivial defects. The result was good to increase a throughput of whole process under little risk.

Citation Download Citation

DaeCheol Lim, Dae-Gyu Seo, and DaeHwa Jeong "Defect classification for the inspection of TFT LCD glass", Proc. SPIE 6051, Optomechatronic Machine Vision, 60510F (6 December 2005); https://doi.org/10.1117/12.639878

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