Nanoimprint process for 2.5Tb/in2 bit patterned media fabricated by self-assembling method

Yasuaki Ootera; Akiko Yuzawa; Takuya Shimada; Ryousuke Yamamoto; Yoshiyuki Kamata; Naoko Kihara; Akira Kikitsu

doi:10.1117/12.878936

2 April 2011 Nanoimprint process for 2.5Tb/in² bit patterned media fabricated by self-assembling method

Yasuaki Ootera, Akiko Yuzawa, Takuya Shimada, Ryousuke Yamamoto, Yoshiyuki Kamata, Naoko Kihara, Akira Kikitsu

Proceedings Volume 7970, Alternative Lithographic Technologies III; 79700K (2011) https://doi.org/10.1117/12.878936
Event: SPIE Advanced Lithography, 2011, San Jose, California, United States

Abstract

Bit patterned media (BPM) is a promising candidate for high-density magnetic recording media beyond 2.5 Tb/in². To realize such a high-density BPM, directed self-assembling (DSA) technology is a possible solution. On the other hand, from the viewpoint of low-cost production, nanoimprint lithography is a promising process for the mass-production of such a high-density BPM. We examine the replication of the BPM etching mask by UV nanoimprint process. At first, the BPM silicon master mold consisting of servo pattern with dot array is made by the DSA method using PS-PDMS. For the 30-nm pitch corresponding to the density of 2.5 Tb/in², the nickel stamper is replicated from the silicon master mold by electroplating. The etching mask is transcribed by the UV nanoimprint process with the transparent mold replicated from the nickel mother stamper. On the other hand, as for the DSA-BPM pattern of 17-nm pitch corresponding to the density of 2.5 Tb/in², we adopt an alternative process and confirm the replication possibility.

Citation Download Citation

Yasuaki Ootera, Akiko Yuzawa, Takuya Shimada, Ryousuke Yamamoto, Yoshiyuki Kamata, Naoko Kihara, and Akira Kikitsu "Nanoimprint process for 2.5Tb/in² bit patterned media fabricated by self-assembling method", Proc. SPIE 7970, Alternative Lithographic Technologies III, 79700K (2 April 2011); https://doi.org/10.1117/12.878936

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available