A lossless circuit layout image compression algorithm for electron beam direct write lithography systems

Jeehong Yang; Serap A. Savari

doi:10.1117/12.881192

4 April 2011 A lossless circuit layout image compression algorithm for electron beam direct write lithography systems

Jeehong Yang, Serap A. Savari

Proceedings Volume 7970, Alternative Lithographic Technologies III; 79701U (2011) https://doi.org/10.1117/12.881192
Event: SPIE Advanced Lithography, 2011, San Jose, California, United States

Abstract

The recent algorithm Corner is a transform-based technique to represent a circuit layout image for electron beam direct write lithography systems. We improve the lossless circuit layout compression algorithm Corner so that 1) it requires fewer symbols during the corner transform, 2) it has a simpler and faster decoding process, and 3) it requires a similar amount of memory for the decoding process.

Citation Download Citation

Jeehong Yang and Serap A. Savari "A lossless circuit layout image compression algorithm for electron beam direct write lithography systems", Proc. SPIE 7970, Alternative Lithographic Technologies III, 79701U (4 April 2011); https://doi.org/10.1117/12.881192

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