Manufacturability of 850nm data communication VCSELs in high volume

Terry E. Sale; Chen Chu; Jeong-Ki Hwang; Gim-Hong Koh; Rashit Nabiev; Jason L.-C. Tan; Laura M. Giovane; Ramana M. V. Murty

doi:10.1117/12.845077

5 February 2010 Manufacturability of 850nm data communication VCSELs in high volume

Terry E. Sale, Chen Chu, Jeong-Ki Hwang, Gim-Hong Koh, Rashit Nabiev, Jason L.-C. Tan, Laura M. Giovane, Ramana M. V. Murty

Author Affiliations +

Proceedings Volume 7615, Vertical-Cavity Surface-Emitting Lasers XIV; 761503 (2010) https://doi.org/10.1117/12.845077
Event: SPIE OPTO, 2010, San Francisco, California, United States

Abstract

Frequently quoted advantages of VCSELs over other optical sources include wafer scale fabrication and testing, low cost, ease of fabricating arrays and ease of fiber coupling. To benefit from these advantages a robust manufacturing process and product demand are needed. Avago Technologies produces a range of single channel and parallel optical link products incorporating 850nm band VCSEL sources operating at up to 10Gb/s per channel. This paper will explore some important factors which need to be controlled for manufacturability of VCSEL devices.

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Terry E. Sale, Chen Chu, Jeong-Ki Hwang, Gim-Hong Koh, Rashit Nabiev, Jason L.-C. Tan, Laura M. Giovane, and Ramana M. V. Murty "Manufacturability of 850nm data communication VCSELs in high volume", Proc. SPIE 7615, Vertical-Cavity Surface-Emitting Lasers XIV, 761503 (5 February 2010); https://doi.org/10.1117/12.845077

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