Characterization and inspection of micro-lens array by SCBS microscope

Weijuan Qu; Oi Choo Chee; Yingjie Yu; Hooi Leng Ng-Lee; Ailing Tian; Anand Asundi

doi:10.1117/12.854121

14 May 2010 Characterization and inspection of micro-lens array by SCBS microscope

Weijuan Qu, Oi Choo Chee, Yingjie Yu, Hooi Leng Ng-Lee, Ailing Tian, Anand Asundi

Proceedings Volume 7718, Optical Micro- and Nanometrology III; 77180P (2010) https://doi.org/10.1117/12.854121
Event: SPIE Photonics Europe, 2010, Brussels, Belgium

Abstract

Micro optics characterization by use of digital holographic microscopy (DHM) is proposed recently. DHM can provide phase image and very suitable for the quantitative mapping of transmission material with a certain refractive index. However, it has been found that in DHM the microscope objective introduces a spherical phase curvature to the object wave which may disturb the measurement especially for the micro-lens array. We present single lens characterization and uniformity inspection of micro-lens array by use of a new concept DHM system developed recently. The new concept DHM is based on a single cube beam-splitter (SCBS) configuration using an MO to provide high resolution on the test specimen. The SCBS is put into the optical path with a small angle between the optical axis and its central semireflecting layer. In this way, light is split into two parts when in and combined to form two holograms when out of SCBS. For the symmetrical configuration of the beam splitter cube, the spherical phase curvature introduced by the MO can be physically compensated during interference. Because no separated light propagation outside the SCBS, the whole system is insensitive to vibration. As light coming out of the MO serves not only the object beam but also the reference beam, it enables the inspection of the uniformity across a whole micro-lens array. Geometrical characterisation of the shape and surface roughness of micro-lens is given as well as the uniformity analysis across the whole array.

Citation Download Citation

Weijuan Qu, Oi Choo Chee, Yingjie Yu, Hooi Leng Ng-Lee, Ailing Tian, and Anand Asundi "Characterization and inspection of micro-lens array by SCBS microscope", Proc. SPIE 7718, Optical Micro- and Nanometrology III, 77180P (14 May 2010); https://doi.org/10.1117/12.854121

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