Vertically aligned silicon nanowires fabricated by electroless etching of silicon wafer

Sabar D. Hutagalung; Agnes S. Y. Tan; Ruo Y. Tan; Yussof Wahab

doi:10.1117/12.861353

19 May 2010 Vertically aligned silicon nanowires fabricated by electroless etching of silicon wafer

Sabar D. Hutagalung, Agnes S. Y. Tan, Ruo Y. Tan, Yussof Wahab

Proceedings Volume 7743, Southeast Asian International Advances in Micro/Nanotechnology; 774305 (2010) https://doi.org/10.1117/12.861353
Event: Southeast Asian International Advances in Micro/Nano-technology, 2010, Bangkok, Thailand

Abstract

Silicon nanowires were synthesized by electroless etching of Si(100) wafer using a mixture of hydrofluoric acid and silver nitrate. The formation of nanowires was catalyzed by silver nanoclusters deposit through an exchange reaction in which both silicon oxidation and silver reduction occur simultaneously on silicon surface. The etchant concentration, etching temperature and duration were well controlled in this work to produce a high aspect ratio of silicon nanowires. The morphological observation indicated that the fabricated silicon nanowires grown vertically on silicon surface. Moreover, a various shapes of rounded-, rectangular-, and triangle-shape are obtained co-exist in the bundle of silicon nanowires.

Citation Download Citation

Sabar D. Hutagalung, Agnes S. Y. Tan, Ruo Y. Tan, and Yussof Wahab "Vertically aligned silicon nanowires fabricated by electroless etching of silicon wafer", Proc. SPIE 7743, Southeast Asian International Advances in Micro/Nanotechnology, 774305 (19 May 2010); https://doi.org/10.1117/12.861353

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available