Paper
19 May 2010 Analysis of photothermally induced vibration in metal coated AFM cantilever
Shahrul Kadri, Hideki Fujiwara, Keiji Sasaki
Author Affiliations +
Proceedings Volume 7743, Southeast Asian International Advances in Micro/Nanotechnology; 774307 (2010) https://doi.org/10.1117/12.861053
Event: Southeast Asian International Advances in Micro/Nano-technology, 2010, Bangkok, Thailand
Abstract
We report the vibration reduction in the optically driven V-shaped AFM cantilever with 70 nm gold surface coating. The driving laser at 780 nm is intensity modulated at 1 kHz to 100 kHz and focused on the AFM cantilever surface. The cantilever vibration amplitude is monitored by HeNe probe laser. Two features are observed: high vibration amplitude of the cantilever (1) at several kHz modulation frequencies regime and (2) at around its mechanical resonance. In addition, we found that vibration at the resonance peak increases when the excitation spot is positioned farther from the free end of the cantilever.
© (2010) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Shahrul Kadri, Hideki Fujiwara, and Keiji Sasaki "Analysis of photothermally induced vibration in metal coated AFM cantilever", Proc. SPIE 7743, Southeast Asian International Advances in Micro/Nanotechnology, 774307 (19 May 2010); https://doi.org/10.1117/12.861053
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Cited by 1 scholarly publication and 3 patents.
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KEYWORDS
Atomic force microscopy

Coating

Gold

Metals

Modulation

Laser beam diagnostics

Microresonators

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