Interferograms processing for zone-plate interferometer

Liang Nie; Guiqin Quan; Gang Wang

doi:10.1117/12.870314

21 July 2010 Interferograms processing for zone-plate interferometer

Liang Nie, Guiqin Quan, Gang Wang

Proceedings Volume 7749, 2010 International Conference on Display and Photonics; 77491Q (2010) https://doi.org/10.1117/12.870314
Event: 2010 International Conference on Display and Photonics, 2010, Nanjing, China

Abstract

The improved zone-plate interferometer (ZPI) is proposed to measure aspheric surface in this paper. A new computer generated hologram (CGH) zone-plate is designed and manufactured, which creates referring wavefronts for aspheric surface in the interferometer. The interferograms of ZPI are closed fringe patterns which are difficult to handle and the processing methods are researched. Two-dimensional fast Fourier transform (FFT) algorithm is proposed to extract phase. The principle and process of FFT method is described and the computer simulation proves its validity. The unwrapped phase distribution is got by the unweighted least-squares phase unwrapping algorithm. The error of aspheric surface is derived from the fitting method of Zernike polynomials. The methods are used to treat the aspheric surface measurement in experiment. The results show that the methods have achieved worthy measurement precision and have great development potential.

Citation Download Citation

Liang Nie, Guiqin Quan, and Gang Wang "Interferograms processing for zone-plate interferometer", Proc. SPIE 7749, 2010 International Conference on Display and Photonics, 77491Q (21 July 2010); https://doi.org/10.1117/12.870314

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