Multipurpose instrument calibration standard for particle beam, scanned probe and optical microscopy: NIST reference material (RM) 8820

Michael T. Postek; András E. Vladar; William Keery; Michael Bishop; Benjamin Bunday; John Allgair

doi:10.1117/12.861595

24 August 2010 Multipurpose instrument calibration standard for particle beam, scanned probe and optical microscopy: NIST reference material (RM) 8820

Michael T. Postek, András E. Vladar, William Keery, Michael Bishop, Benjamin Bunday, John Allgair

Author Affiliations +

Proceedings Volume 7767, Instrumentation, Metrology, and Standards for Nanomanufacturing IV; 77670D (2010) https://doi.org/10.1117/12.861595
Event: SPIE NanoScience + Engineering, 2010, San Diego, California, United States

Abstract

NIST has introduced a new standard for dimensional metrology and the calibration of the scanning electron microscope (SEM) scale identifi ed as Reference Material (RM) 8820. RM 8820 was primarily intended to be used for calibrating the X and Y scale (or magnifi cation) in SEMs but, can be used for an many other purposes. Essentially, all laboratory microscopes can be calibrated to this same artifact. The NIST pattern is only one part of a very large array of test structures that were designed for various dimensional metrology purposes useful to semiconductor production technologies. These and other purposes, discussed in the presentation, RM 8820 can also be used on/in any other type of microscope, such as optical and scanning probe microscopes and for scatterometry measurements.

Citation Download Citation

Michael T. Postek, András E. Vladar, William Keery, Michael Bishop, Benjamin Bunday, and John Allgair "Multipurpose instrument calibration standard for particle beam, scanned probe and optical microscopy: NIST reference material (RM) 8820", Proc. SPIE 7767, Instrumentation, Metrology, and Standards for Nanomanufacturing IV, 77670D (24 August 2010); https://doi.org/10.1117/12.861595

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available