Noise reduction in dynamic interferometry measurements

Michael North Morris; Markar Naradikian; James Millerd

doi:10.1117/12.860450

2 August 2010 Noise reduction in dynamic interferometry measurements

Michael North Morris, Markar Naradikian, James Millerd

Proceedings Volume 7790, Interferometry XV: Techniques and Analysis; 77900O (2010) https://doi.org/10.1117/12.860450
Event: SPIE Optical Engineering + Applications, 2010, San Diego, California, United States

Abstract

A method for reducing the coherent noise, by a factor of two, in dynamic interferometry measurements is presented. Reducing coherent noise is particularly important in "on-machine" metrology applications where residual noise can be polished into the surface under test. Both theory and experimental measurements are discussed.

Citation Download Citation

Michael North Morris, Markar Naradikian, and James Millerd "Noise reduction in dynamic interferometry measurements", Proc. SPIE 7790, Interferometry XV: Techniques and Analysis, 77900O (2 August 2010); https://doi.org/10.1117/12.860450

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available