Optical homodyne common-path grating interferometer with sub-nanometer displacement resolution

Chyan-Chyi Wu; Chun-Yao Cheng; Zi-Yi Yang

doi:10.1117/12.860513

2 August 2010 Optical homodyne common-path grating interferometer with sub-nanometer displacement resolution

Chyan-Chyi Wu, Chun-Yao Cheng, Zi-Yi Yang

Proceedings Volume 7791, Interferometry XV: Applications; 779105 (2010) https://doi.org/10.1117/12.860513
Event: SPIE Optical Engineering + Applications, 2010, San Diego, California, United States

Abstract

Grating interferometers overcome the diffraction limit of optical waves. They can provide nano-scale displacement resolution, and will have great potential for nano-metrology applications. The optical configurations of used grating interferometers are Michelson's type with different paths between the measurement beam and reference beam. Environmental disturbance can directly enter the measured signals and cannot be essentially slashed. Thus the accuracy of the used grating interferometers becomes dramatically worse. In this paper, a homodyne common-path grating interferometer is proposed, that can reduce the environmental disturbance at its lowest level. It has promising potential for nanotechnology applications. The measurement principle and experimental verifications are done in the work.

Citation Download Citation

Chyan-Chyi Wu, Chun-Yao Cheng, and Zi-Yi Yang "Optical homodyne common-path grating interferometer with sub-nanometer displacement resolution", Proc. SPIE 7791, Interferometry XV: Applications, 779105 (2 August 2010); https://doi.org/10.1117/12.860513

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available