Tip-based nanofabrication: an approach to true nanotechnology

Adam R. Schofield; Kristen P. Bloschock; Thomas W. Kenny

doi:10.1117/12.852269

2 April 2010 Tip-based nanofabrication: an approach to true nanotechnology

Adam R. Schofield, Kristen P. Bloschock, Thomas W. Kenny

Proceedings Volume 7637, Alternative Lithographic Technologies II; 76371D (2010) https://doi.org/10.1117/12.852269
Event: SPIE Advanced Lithography, 2010, San Jose, California, United States

Abstract

In order to unlock the true potential of nanotechnology, the development of controlled nanomanufacturing techniques for individual structures is critical. While the capability to grow, deposit, and manipulate nanostructures currently exists, the ability to reliably fabricate these devices with controlled differences in size, shape, and orientation at various substrate positions does not exist. To bridge this gap, the Defense Advanced Research Projects Agency (DARPA) launched the Tip-Based Nanofabrication (TBN) research program with the intent of achieving controlled nanomanufacturing of nanowires, nanotubes and quantum dots using functionalized AFM cantilevers and tips. This work describes the background, goals, and current approaches being explored during the multi-year TBN program.

Citation Download Citation

Adam R. Schofield, Kristen P. Bloschock, and Thomas W. Kenny "Tip-based nanofabrication: an approach to true nanotechnology", Proc. SPIE 7637, Alternative Lithographic Technologies II, 76371D (2 April 2010); https://doi.org/10.1117/12.852269

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