A comparison of advanced overlay technologies

Prasad Dasari; Nigel Smith; Gary Goelzer; Zhuan Liu; Jie Li; Asher Tan; Chin Hwee Koh

doi:10.1117/12.848189

1 April 2010 A comparison of advanced overlay technologies

Prasad Dasari, Nigel Smith, Gary Goelzer, Zhuan Liu, Jie Li, Asher Tan, Chin Hwee Koh

Proceedings Volume 7638, Metrology, Inspection, and Process Control for Microlithography XXIV; 76381P (2010) https://doi.org/10.1117/12.848189
Event: SPIE Advanced Lithography, 2010, San Jose, California, United States

Abstract

The extension of optical lithography to 22nm and beyond by Double Patterning Technology is often challenged by CDU and overlay control. With reduced overlay measurement error budgets in the sub-nm range, relying on traditional Total Measurement Uncertainty (TMU) estimates alone is no longer sufficient. In this paper we will report scatterometry overlay measurements data from a set of twelve test wafers, using four different target designs. The TMU of these measurements is under 0.4nm, within the process control requirements for the 22nm node. Comparing the measurement differences between DBO targets (using empirical and model based analysis) and with image-based overlay data indicates the presence of systematic and random measurement errors that exceeds the TMU estimate.

Citation Download Citation

Prasad Dasari, Nigel Smith, Gary Goelzer, Zhuan Liu, Jie Li, Asher Tan, and Chin Hwee Koh "A comparison of advanced overlay technologies", Proc. SPIE 7638, Metrology, Inspection, and Process Control for Microlithography XXIV, 76381P (1 April 2010); https://doi.org/10.1117/12.848189

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