Improved scanner matching using scanner fleet matcher (SFM)

Shian-Huan Cooper Chiu; Chin-Lung Lee; Sheng-Hsiung Yu; Kai-Lin Fu; Min-Hin Tung; Po-Chih Chen; Chao-Tien Huang; Chien-Chun Elsie Yu; Chin-Chou K. Huang; John C. Robinson; David Tien

doi:10.1117/12.846667

1 April 2010 Improved scanner matching using scanner fleet matcher (SFM)

Shian-Huan Cooper Chiu, Chin-Lung Lee, Sheng-Hsiung Yu, Kai-Lin Fu, Min-Hin Tung, Po-Chih Chen, Chao-Tien Huang, Chien-Chun Elsie Yu, Chin-Chou K. Huang, John C. Robinson, David Tien

Author Affiliations +

Proceedings Volume 7638, Metrology, Inspection, and Process Control for Microlithography XXIV; 76382A (2010) https://doi.org/10.1117/12.846667
Event: SPIE Advanced Lithography, 2010, San Jose, California, United States

Abstract

This project is the continuation of work reported previously at this conference (Yu, et. al., SPIE 2009). A new software tool for developing a static scanner fleet matching (SFM) matrix is tested including fleet snapshot and scanner pair drilldown. In addition the latest scanner models can adjust the distortion performance dynamically, at run-time, improving effective overlay performance of the scanner fleet, and allowing more flexibility for mix-and match exposure. The goal is to improve overlay |mean|+3s significantly between scanners for critical layer pairs.

Citation Download Citation

Shian-Huan Cooper Chiu, Chin-Lung Lee, Sheng-Hsiung Yu, Kai-Lin Fu, Min-Hin Tung, Po-Chih Chen, Chao-Tien Huang, Chien-Chun Elsie Yu, Chin-Chou K. Huang, John C. Robinson, and David Tien "Improved scanner matching using scanner fleet matcher (SFM)", Proc. SPIE 7638, Metrology, Inspection, and Process Control for Microlithography XXIV, 76382A (1 April 2010); https://doi.org/10.1117/12.846667

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