Full Content is available to subscribers

Subscribe/Learn More  >
Proceedings Article

Implementing and validating double patterning in 22-nm to 16-nm product design and patterning flows

[+] Author Affiliations
Myung-Soo Noh, Beom-Seok Seo, Suk-Joo Lee

SAMSUNG Electronics Co., Ltd. (Korea, Republic of)

Alex Miloslavsky

Synopsys (USA)

Christopher Cork

Synopsys SARL (France)

Levi Barnes

Synopsys Technology Park (USA)

Kevin Lucas

Synopsys Inc. (USA)

Proc. SPIE 7640, Optical Microlithography XXIII, 76400S (March 03, 2010); doi:10.1117/12.848194
Text Size: A A A
From Conference Volume 7640

  • Optical Microlithography XXIII
  • Mircea V. Dusa; Will Conley
  • San Jose, California | February 21, 2010

abstract

In double-patterning technology (DPT), we study the complex interactions of layout creation, physical design and design rule checking flows for the 22nm and 16nm device nodes. Decomposition includes the cutting (splitting) of original design-intent features into new overlapping polygons where required; and the coloring of all the resulting polygons into two mask layouts. We discuss the advantages of geometric distribution for polygon operations with the limited range of influence. Further, we find that even the naturally global coloring step can be handled in a geometrically local manner. We analyze and compare the latest methods for designing, processing and verifying DPT methods including the 22nm and 16nm nodes.

© (2010) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

Myung-Soo Noh ; Beom-Seok Seo ; Suk-Joo Lee ; Alex Miloslavsky ; Christopher Cork, et al.
"Implementing and validating double patterning in 22-nm to 16-nm product design and patterning flows", Proc. SPIE 7640, Optical Microlithography XXIII, 76400S (March 03, 2010); doi:10.1117/12.848194; http://dx.doi.org/10.1117/12.848194


Access This Proceeding
Sign in or Create a personal account to Buy this proceeding ($15 for members, $18 for non-members).

Figures

Tables

NOTE:
Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging & repositioning the boxes below.

Related Book Chapters

Topic Collections

Advertisement
  • Don't have an account?
  • Subscribe to the SPIE Digital Library
  • Create a FREE account to sign up for Digital Library content alerts and gain access to institutional subscriptions remotely.
Access This Proceeding
Sign in or Create a personal account to Buy this proceeding ($15 for members, $18 for non-members).
Access This Proceeding
Sign in or Create a personal account to Buy this article ($15 for members, $18 for non-members).
Access This Chapter

Access to SPIE eBooks is limited to subscribing institutions and is not available as part of a personal subscription. Print or electronic versions of individual SPIE books may be purchased via SPIE.org.