Exchangeable grating couplers for integrated optics

Miroslav Skalsky; Jiri Ctyroky; Miroslav Miler

doi:10.1117/12.498525

8 July 2003 Exchangeable grating couplers for integrated optics

Miroslav Skalsky, Jiri Ctyroky, Miroslav Miler

Proceedings Volume 5036, Photonics, Devices, and Systems II; (2003) https://doi.org/10.1117/12.498525
Event: Photonics, Devices, and Systems II, 2002, Prague, Czech Republic

Abstract

Mode spectroscopy is a widely used technique for characterizing planar optical waveguides. Prism couplers are mostly used due to their versatility. For higher-index waveguides like SiO₂/SiN or GaInAsP/InP, prism coupling is hampered by the lack of suitable high-index material for fabricating coupling prisms. In this case, short-period grating couplers could be used, instead. We describe the fabrication of “exchangeable” grating couplers with 1200, 1800, and 2400 lines/mm into a photo-curable polymer by copying master grating generated holographically. The grating couplers were applied to glass and Si/SiO₂/SiN waveguides, and results were compared with those obtained using prism coupling. Fabrication of gratings with shorter periods is under way.

Citation Download Citation

Miroslav Skalsky, Jiri Ctyroky, and Miroslav Miler "Exchangeable grating couplers for integrated optics", Proc. SPIE 5036, Photonics, Devices, and Systems II, (8 July 2003); https://doi.org/10.1117/12.498525

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