Image stepper: high-resolution image processing using distributed computing

Volker Tympel; Roberto Witt; Shannon Layland

doi:10.1117/12.482639

2 June 2003 Image stepper: high-resolution image processing using distributed computing

Volker Tympel, Roberto Witt, Shannon Layland

Proceedings Volume 5038, Metrology, Inspection, and Process Control for Microlithography XVII; (2003) https://doi.org/10.1117/12.482639
Event: Microlithography 2003, 2003, Santa Clara, California, United States

Abstract

A high-speed image processing has been created. Distributed computing is used to get the necessary resources. Controlling a high-resolution microscope, the image processing system grabs thousands of single images from different XYZ-positions. The system can get all available optical information from a greater microscopical structure like a complete chip on a wafer. Image pre-processing functions are used to eliminate optical effects like shading. A digital contrast enhancement is also available to get a better image quality. The scanning process can take several hours if a high-aperture objective lens is used. At the end we have a complex cluster image structure, and after the image post-processing the creation of the mosaic image can be started. The post-processing functions reduce the 3D data to 2D data. Best focus images can be defined or extended depth of focus images can be created. XY-neighboring images have overlapped areas. In two runs a correlation function define offset values. In a XY-run all available offset values define the final offset values. The result can be checked and manual changes are possible before writing the final mosaic image file.

Citation Download Citation

Volker Tympel, Roberto Witt, and Shannon Layland "Image stepper: high-resolution image processing using distributed computing", Proc. SPIE 5038, Metrology, Inspection, and Process Control for Microlithography XVII, (2 June 2003); https://doi.org/10.1117/12.482639

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available