Fabrication of composite structures based on microwrinkles

Xiaoli Zhao; Weiwei An; Haichao Yu; Liqin Wang

doi:10.1117/12.867937

13 October 2010 Fabrication of composite structures based on microwrinkles

Xiaoli Zhao, Weiwei An, Haichao Yu, Liqin Wang

Proceedings Volume 7654, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirrors and Telescopes; 76541C (2010) https://doi.org/10.1117/12.867937
Event: 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies, 2010, Dalian, China

Abstract

The composite structures were fabricated by wrinkle formation and optical lithography. Complex and ordered wrinkle patterns are spontaneously created on metal thin films thermally deposited onto elastomeric polymers owing to mismatch of thermal expansion. In the experiments, a thin film of Au with 20-50 nm thick was deposited by ion sputtering on the surface of polydimethylsiloxane (PDMS) substrates. To modulate wrinkle patterns regularly and uniformly, optical lithography was used to fabricate given structures in Silicon wafers, and these structures were transferred onto PDMS substrates by replica molding. In the process of wrinkle formation, the configuration on the PDMS substrates could effect or regulate wrinkle formation, and so the composite structures effectively integrate the lithographic and wrinkle patterns. These unique structures have potential application in optical devices, sensors and actuators.

Citation Download Citation

Xiaoli Zhao, Weiwei An, Haichao Yu, and Liqin Wang "Fabrication of composite structures based on microwrinkles", Proc. SPIE 7654, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirrors and Telescopes, 76541C (13 October 2010); https://doi.org/10.1117/12.867937

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