Sol-gel fabrication of high-quality photomask substrates

Rahul Ganguli; D. Laurence Meixner; Steve G. Colbern; Matt S. Gleason; Douglas E. Meyers; Satyabrata Ray Chaudhuri

doi:10.1117/12.485341

26 June 2003 Sol-gel fabrication of high-quality photomask substrates

Rahul Ganguli, D. Laurence Meixner, Steve G. Colbern, Matt S. Gleason, Douglas E. Meyers, Satyabrata Ray Chaudhuri

Proceedings Volume 5040, Optical Microlithography XVI; (2003) https://doi.org/10.1117/12.485341
Event: Microlithography 2003, 2003, Santa Clara, California, United States

Abstract

Synthetic silica photomask substrates are currently manufactured by cutting, grinding, and polishing glass boules prepared using a flame hydrolysis process. YTC America is developing an alternative technique, based on sol-gel processing, to fabricate high quality substrates. This new technology allows near net shape fabrication of synthetic silica monoliths, thus eliminating the need for cutting and grinding. The complex relationship between glass properties and process parameters in the formulation, drying, and sintering steps has been determined, and a repeatable process has been established. These substrates meet all SEMI specifications for ULTE hard surface photomask substrates for 248-nm lithography. The technology may also be extended to 193-nm and 157-nm photomask substrates. This sol-gel-based process may represent a unique and cost-effective alternative for manufacturing photomask substrates for deep UV lithography.

Citation Download Citation

Rahul Ganguli, D. Laurence Meixner, Steve G. Colbern, Matt S. Gleason, Douglas E. Meyers, and Satyabrata Ray Chaudhuri "Sol-gel fabrication of high-quality photomask substrates", Proc. SPIE 5040, Optical Microlithography XVI, (26 June 2003); https://doi.org/10.1117/12.485341

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
8 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Sol-gels

Glasses

Photomasks

Silica

Fluorine

Deep ultraviolet

Birefringence

Show All Keywords

Keywords/Phrases

Search In:

Publication Years