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Proceedings Article

Monolithic detector array comprised of >1000 aerial image sensing elements

[+] Author Affiliations
Roderick R. Kunz, Dennis D. Rathman, Steven J. Spector

MIT Lincoln Lab. (USA)

Michael S. Yeung

Boston Univ. (USA)

Proc. SPIE 5040, Optical Microlithography XVI, 1441 (June 25, 2003); doi:10.1117/12.485414
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From Conference Volume 5040

  • Optical Microlithography XVI
  • Anthony Yen
  • Santa Clara, CA | February 23, 2003

abstract

A monolithically integrated multi-element photodiode array with 7749 discrete detectors has been fabricated where each sensing element is equipped with a sampling aperture to allow for aerial image measurements with high spatial precision in the focal plane of lithographic lenses. As currently configured, any one of seven 1107-element linear arrays can be used at a given time to allow sampling across the long axis of a scanner lens. The individual elements are located 24 microns apart and are broken down into 27 sets of 41 distinctly different aperture types, with each set spaced 1 mm apart. In addition, the sampling apertures on the device are small enough to allow the device to act as a polarization sensor with high (<50 microns) spatial resolution. The high speed analog output amplifier allows for complete 1107-element images to be obtained at the full repetition rate of lithographic lasers (2KHz).

© (2003) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

Roderick R. Kunz ; Dennis D. Rathman ; Steven J. Spector and Michael S. Yeung
"Monolithic detector array comprised of >1000 aerial image sensing elements", Proc. SPIE 5040, Optical Microlithography XVI, 1441 (June 25, 2003); doi:10.1117/12.485414; http://dx.doi.org/10.1117/12.485414


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