A monolithically integrated multi-element photodiode array with 7749 discrete detectors has been fabricated where each sensing element is equipped with a sampling aperture to allow for aerial image measurements with high spatial precision in the focal plane of lithographic lenses. As currently configured, any one of seven 1107-element linear arrays can be used at a given time to allow sampling across the long axis of a scanner lens. The individual elements are located 24 microns apart and are broken down into 27 sets of 41 distinctly different aperture types, with each set spaced 1 mm apart. In addition, the sampling apertures on the device are small enough to allow the device to act as a polarization sensor with high (<50 microns) spatial resolution. The high speed analog output amplifier allows for complete 1107-element images to be obtained at the full repetition rate of lithographic lasers (2KHz).© (2003) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.