Filter model based dwell time algorithm for ion beam figuring

Yun Li; Tingwen Xing

doi:10.1117/12.866144

6 October 2010 Filter model based dwell time algorithm for ion beam figuring

Yun Li, Tingwen Xing

Proceedings Volume 7655, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 76551K (2010) https://doi.org/10.1117/12.866144
Event: 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies, 2010, Dalian, China

Abstract

The process of Ion Beam Figuring (IBF) can be described by a two-dimensional convolution equation which including dwell time. Solving the dwell time is a key problem in IBF. Theoretically, the dwell time can be solved from a two-dimensional deconvolution. However, it is often ill-posed]; the suitable solution of that is hard to get. In this article, a dwell time algorithm is proposed, depending on the characters of IBF. Usually, the Beam Removal Function (BRF) in IBF is Gaussian, which can be regarded as a headstand Gaussian filter. In its stop-band, the filter has various filtering abilities for various frequencies. The dwell time algorithm proposed in this article is just based on this concept. The Curved Surface Smooth Extension (CSSE) method and Fast Fourier Transform (FFT) algorithm are also used. The simulation results show that this algorithm is high precision, effective, and suitable for actual application.

Citation Download Citation

Yun Li and Tingwen Xing "Filter model based dwell time algorithm for ion beam figuring", Proc. SPIE 7655, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 76551K (6 October 2010); https://doi.org/10.1117/12.866144

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KEYWORDS

Ion beam finishing

Ion beams

Spatial frequencies

Ions

Deconvolution

Computer simulations

Gaussian filters

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