Nanoscale nondestructive evaluation of materials and devices by ultrasonic atomic force microscopy

Kazushi Yamanaka; Toshihiro Tsuji; Hiroshi Irihama; Tsuyoshi Mihara

doi:10.1117/12.483823

22 July 2003 Nanoscale nondestructive evaluation of materials and devices by ultrasonic atomic force microscopy

Kazushi Yamanaka, Toshihiro Tsuji, Hiroshi Irihama, Tsuyoshi Mihara

Proceedings Volume 5045, Testing, Reliability, and Application of Micro- and Nano-Material Systems; (2003) https://doi.org/10.1117/12.483823
Event: NDE for Health Monitoring and Diagnostics, 2003, San Diego, California, United States

Abstract

Two evaluation methods of nano-scale internal defects by ultrasonic atomic force microscopy (UAFM) is reviewed. The first one is a linear vibration analysis of the contact stiffness calculated from a finite element method analysis of a model including a subsurface gap. The second one is a nonlinear vibration analysis of a stiffening or softening spring representing the opening-and-closing behavior of the gap. These methods were verified by the resonance frequency mapping, the load dependence of the resonance frequency and the resonance spectra in UAFM on a subsurface gap in highly oriented pyrolytic graphite. It was proved that the proposed methods are useful for evaluating the crack closure/opening on the nano-scale.

Citation Download Citation

Kazushi Yamanaka, Toshihiro Tsuji, Hiroshi Irihama, and Tsuyoshi Mihara "Nanoscale nondestructive evaluation of materials and devices by ultrasonic atomic force microscopy", Proc. SPIE 5045, Testing, Reliability, and Application of Micro- and Nano-Material Systems, (22 July 2003); https://doi.org/10.1117/12.483823

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