Speed mismatch error in the profile measurement of moving object by using TDI imaging system

Eryi Hu

doi:10.1117/12.863589

11 October 2010 Speed mismatch error in the profile measurement of moving object by using TDI imaging system

Eryi Hu

Proceedings Volume 7656, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 76561W (2010) https://doi.org/10.1117/12.863589
Event: 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies, 2010, Dalian, China

Abstract

In the projected grating phase profilometry, the CCD camera operating in time delay and integration (TDI) mode is used to record the deformed fringe patterns. In this paper, the measuring system is consisted of a TDI CCD camera, a projector, optical lens and a personal computer. The detected object is put on a reference plane, and a sinusoidal grating is projected upon the object surface and reference plane at an incidence angle, respectively. The deformed fringe pattern of the detected object is captured by the TDI CCD camera, and the deformed fringe pattern is recorded in the personal computer for processing. A fast Fourier transform combining with a filtering method is used to extract the phase information caused by the profile of the detected object. The phase error caused by the image distortion is researched by simulative analysis when the moving speed mismatch between the TDI camera and the detected object is occurred.

Citation Download Citation

Eryi Hu "Speed mismatch error in the profile measurement of moving object by using TDI imaging system", Proc. SPIE 7656, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 76561W (11 October 2010); https://doi.org/10.1117/12.863589

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