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Proceedings Article

Laser-induced single step micro/nanopatterning

[+] Author Affiliations
Dieter Baeuerle, Gerard Wysocki, Lars Landstroem, Johannes Klimstein, Klaus Piglmayer, Johannes Heitz

Johannes-Kepler-Univ. Linz (Austria)

Proc. SPIE 5063, Fourth International Symposium on Laser Precision Microfabrication, 8 (November 20, 2003); doi:10.1117/12.541052
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From Conference Volume 5063

  • Fourth International Symposium on Laser Precision Microfabrication
  • Isamu Miyamoto; Andreas Ostendorf; Koji Sugioka; Henry Helvajian
  • Munich, Germany | June 21, 2003

abstract

Recent achievements in laser-induced surface patterning obtained in our group are summarized. Here, we have employed both a SNOM-type setup and two-dimensional lattices of SiO2 microspheres formed by self-assembly processes. With the SNOM-type setup we have demonstrated nanoscale photochemical and photothermal etching, mainly of Si in Cl2 atmosphere. With 2D lattices of microspheres a large number of single features can be generated by a single or a few laser shots. Among the examples presented is the surface patterning by ablation, etching, deposition, and surface modification.

© (2003) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

Dieter Baeuerle ; Gerard Wysocki ; Lars Landstroem ; Johannes Klimstein ; Klaus Piglmayer, et al.
"Laser-induced single step micro/nanopatterning", Proc. SPIE 5063, Fourth International Symposium on Laser Precision Microfabrication, 8 (November 20, 2003); doi:10.1117/12.541052; http://dx.doi.org/10.1117/12.541052


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