Micro sculpting technology using DPSSL

Won-Seok Chang; Bosung Shin; Jae-gu Kim; Kyung-Hyun Whang

doi:10.1117/12.540534

18 November 2003 Micro sculpting technology using DPSSL

Won-Seok Chang, Bosung Shin, Jae-gu Kim, Kyung-Hyun Whang

Proceedings Volume 5063, Fourth International Symposium on Laser Precision Microfabrication; (2003) https://doi.org/10.1117/12.540534
Event: Fourth International Symposium on Laser Precision Microfabrication, 2003, Munich, Germany

Abstract

Multiple pulse laser ablation of polymer is performed with DPSS (Diode Pumped Solid State) 3rd harmonic Nd:YVO₄ laser (355 nm) in order to fabricate three-dimensional micro components. Here we considered mechanistic aspects of the interaction between UV laser and polymer to obtain optimum process conditions for maskless photomachining using DPSSL. The photo-physical and photochemical parameters such as laser wavelength and optical characteristics of polymers are investigated by experiments to reduce plume effect, which induce the re-deposited debris on the surface of substrate. In this study, LDST (laser direct sculpting technique) are developed to gain various three-dimensional shape with size less than 500 micrometer. Main process sequences are from rapid prototyping technology such as CAD/CAM modeling of products, machining path generation, layer-by-layer machining, and so on. This method can be applied to manufacture the prototype of micro device and the polymer mould for mass production without expensive mask fabrication.

Citation Download Citation

Won-Seok Chang, Bosung Shin, Jae-gu Kim, and Kyung-Hyun Whang "Micro sculpting technology using DPSSL", Proc. SPIE 5063, Fourth International Symposium on Laser Precision Microfabrication, (18 November 2003); https://doi.org/10.1117/12.540534

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