MEMS and piezo actuator-based Fabry-Perot interferometer technologies and applications at VTT

Jarkko Antila; Akseli Miranto; Jussi Mäkynen; Mari Laamanen; Anna Rissanen; Martti Blomberg; Heikki Saari; Jouko Malinen

doi:10.1117/12.850164

27 April 2010 MEMS and piezo actuator-based Fabry-Perot interferometer technologies and applications at VTT

Jarkko Antila, Akseli Miranto, Jussi Mäkynen, Mari Laamanen, Anna Rissanen, Martti Blomberg, Heikki Saari, Jouko Malinen

Author Affiliations +

Proceedings Volume 7680, Next-Generation Spectroscopic Technologies III; 76800U (2010) https://doi.org/10.1117/12.850164
Event: SPIE Defense, Security, and Sensing, 2010, Orlando, Florida, United States

Abstract

Miniaturized spectrometers covering spectral regions from UV to thermal IR are of interest for several applications. For these purposes VTT has for many years been developing tuneable MEMS-based and more recently piezo-actuated Fabry-Perot Interferometers (FPIs). Lately several inventions have been made to enter new wavelengths in the VIS range and enlarge apertures of MEMS devices and also extending the wavelength range of piezo-actuated FPIs. In this paper the background and the latest FPI technologies at VTT are reviewed and new results on components and system level demonstrators are presented. The two FPI technologies are compared from performance and application point of view. Finally insight is given to the further development of next generation devices.

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Jarkko Antila, Akseli Miranto, Jussi Mäkynen, Mari Laamanen, Anna Rissanen, Martti Blomberg, Heikki Saari, and Jouko Malinen "MEMS and piezo actuator-based Fabry-Perot interferometer technologies and applications at VTT", Proc. SPIE 7680, Next-Generation Spectroscopic Technologies III, 76800U (27 April 2010); https://doi.org/10.1117/12.850164

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