MEMS mirror array for a wavelength-selective 1xK switch

Daniel O. Lopez; Flavio Pardo; Vladimir A. Aksyuk; M. E. Simon; Herbert R. Shea; Dan M. Marom; David T. Neilson; Raymond A. Cirelli; Fred P. Klemens; William M. Mansfield; Linus A. Fetter; E. Bower; John F. Miner; T. W. Sorsch

doi:10.1117/12.504381

24 April 2003 MEMS mirror array for a wavelength-selective 1xK switch

Daniel O. Lopez, Flavio Pardo, Vladimir A. Aksyuk, M. E. Simon, Herbert R. Shea, Dan M. Marom, David T. Neilson, Raymond A. Cirelli, Fred P. Klemens, William M. Mansfield, Linus A. Fetter, E. Bower, John F. Miner, T. W. Sorsch

Author Affiliations +

Proceedings Volume 5116, Smart Sensors, Actuators, and MEMS; (2003) https://doi.org/10.1117/12.504381
Event: Microtechnologies for the New Millennium 2003, 2003, Maspalomas, Gran Canaria, Canary Islands, Spain

Abstract

We present a new MEMS mirror device that fulfills the requirements needed for its use in a wavelength selective switch. The MEMS device consists of a 1D array of individually controllable tilt micromirrors with almost 100% filling factor. Each mirror in the array is used to manipulate an individual wavelength channel, attenuating or redirecting it into a different output. The mirrors are electrostatically rotated around a fixed pivot and they use a novel concept of angle amplification to increase their out-of-plane angular rotation. A detailed analysis of their mechanical and optical response is presented.

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Daniel O. Lopez, Flavio Pardo, Vladimir A. Aksyuk, M. E. Simon, Herbert R. Shea, Dan M. Marom, David T. Neilson, Raymond A. Cirelli, Fred P. Klemens, William M. Mansfield, Linus A. Fetter, E. Bower, John F. Miner, and T. W. Sorsch "MEMS mirror array for a wavelength-selective 1xK switch", Proc. SPIE 5116, Smart Sensors, Actuators, and MEMS, (24 April 2003); https://doi.org/10.1117/12.504381

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