Finline technology for millimeter-wave MEMS

Jeffrey S. Fu; Jiaoyun Zhou; Yilong Lu; Jianguo Ma; Zhongxiang Shen

doi:10.1117/12.487702

24 April 2003 Finline technology for millimeter-wave MEMS

Jeffrey S. Fu, Jiaoyun Zhou, Yilong Lu, Jianguo Ma, Zhongxiang Shen

Proceedings Volume 5116, Smart Sensors, Actuators, and MEMS; (2003) https://doi.org/10.1117/12.487702
Event: Microtechnologies for the New Millennium 2003, 2003, Maspalomas, Gran Canaria, Canary Islands, Spain

Abstract

Recent development of finline 35 GHz MEM modules like Gunn oscillator, PIN switch, and filters at Nanyang Technological University will be discussed. The design tools and measurement equipments like Advanced Design System (ADS), High Frequency Structure Simulator (HFSS) and Vector Network Analyzer (VNA) are used extensively throughout the work.

Citation Download Citation

Jeffrey S. Fu, Jiaoyun Zhou, Yilong Lu, Jianguo Ma, and Zhongxiang Shen "Finline technology for millimeter-wave MEMS", Proc. SPIE 5116, Smart Sensors, Actuators, and MEMS, (24 April 2003); https://doi.org/10.1117/12.487702

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