Novel three-axis silicon probe with integrated circuit on chip for microsystem components

Vladimir Nesterov; Petcharin Pornnoppadol; Uwe Brand; Ralph Wilke; M. Schmidt; Stephanus Buettgenbach

doi:10.1117/12.499264

24 April 2003 Novel three-axis silicon probe with integrated circuit on chip for microsystem components

Vladimir Nesterov, Petcharin Pornnoppadol, Uwe Brand, Ralph Wilke, M. Schmidt, Stephanus Buettgenbach

Proceedings Volume 5116, Smart Sensors, Actuators, and MEMS; (2003) https://doi.org/10.1117/12.499264
Event: Microtechnologies for the New Millennium 2003, 2003, Maspalomas, Gran Canaria, Canary Islands, Spain

Abstract

A three-axis micro probe with wiring of the piezoresistors to Wheatstone bridges on the silicon membrane was currently developed for application in high precision coordinate measuring machines (CMM). The methods and results of the experimental investigation of the main properties of the 3d micro probe are presented. The influence of temperature and light onto the probe performance is described. Finally a brief outlook on the optimization of the threshold sensitivity is given.

Citation Download Citation

Vladimir Nesterov, Petcharin Pornnoppadol, Uwe Brand, Ralph Wilke, M. Schmidt, and Stephanus Buettgenbach "Novel three-axis silicon probe with integrated circuit on chip for microsystem components", Proc. SPIE 5116, Smart Sensors, Actuators, and MEMS, (24 April 2003); https://doi.org/10.1117/12.499264

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