Pulsed laser deposition of ZnO thin films in silicon and sapphire

Alexander I. Khudobenko; Alexander N. Zherikhin; R. T. Williams; J. Wilkinson; K. B. Ucer; G. Xiong; V. V. Voronov

doi:10.1117/12.515618

2 September 2003 Pulsed laser deposition of ZnO thin films in silicon and sapphire

Alexander I. Khudobenko, Alexander N. Zherikhin, R. T. Williams, J. Wilkinson, K. B. Ucer, G. Xiong, V. V. Voronov

Proceedings Volume 5121, Laser Processing of Advanced Materials and Laser Microtechnologies; (2003) https://doi.org/10.1117/12.515618
Event: Laser Processing of Advanced Materials and Laser Microtechnologies, 2002, Moscow, Russian Federation

Abstract

We investigated pulsed laser deposition (PLD) of ZnO films on silicon and sapphire substrates. Photoluminescence (PL), electrical properties and crystal structure of films were investigated. Stimulated emission in region 400 nm was observed.

Citation Download Citation

Alexander I. Khudobenko, Alexander N. Zherikhin, R. T. Williams, J. Wilkinson, K. B. Ucer, G. Xiong, and V. V. Voronov "Pulsed laser deposition of ZnO thin films in silicon and sapphire", Proc. SPIE 5121, Laser Processing of Advanced Materials and Laser Microtechnologies, (2 September 2003); https://doi.org/10.1117/12.515618

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