Testing optical surfaces by high-precision diffractive null lenses with integrated reference surface

Alexander G. Poleshchuk; Vadim Cherkashin; Jean-Michel Asfour

doi:10.1117/12.500295

3 October 2003 Testing optical surfaces by high-precision diffractive null lenses with integrated reference surface

Alexander G. Poleshchuk, Vadim Cherkashin, Jean-Michel Asfour

Proceedings Volume 5145, Microsystems Engineering: Metrology and Inspection III; (2003) https://doi.org/10.1117/12.500295
Event: Optical Metrology, 2003, Munich, Germany

Abstract

Fizeau interferometers with an additional diffractive optical element are frequently used for measuring spherical and aspherical surfaces. We present a new design, were the Fizeau principle is now perfectly fulfilled, by generating reference and measuring wavefront on the last optical surface, carrying a diffractive optical element. Several advantages of this design are discussed and proved experimentally.

Citation Download Citation

Alexander G. Poleshchuk, Vadim Cherkashin, and Jean-Michel Asfour "Testing optical surfaces by high-precision diffractive null lenses with integrated reference surface", Proc. SPIE 5145, Microsystems Engineering: Metrology and Inspection III, (3 October 2003); https://doi.org/10.1117/12.500295

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