Micromachining with ultrashort laser pulses: from basic understanding to technical applications

Friedrich Dausinger; Helmut Hugel; Vitali I. Konov

doi:10.1117/12.537496

14 November 2003 Micromachining with ultrashort laser pulses: from basic understanding to technical applications

Friedrich Dausinger, Helmut Hugel, Vitali I. Konov

Proceedings Volume 5147, ALT'02 International Conference on Advanced Laser Technologies; (2003) https://doi.org/10.1117/12.537496
Event: ALT'02 International Conference on Advanced laser Technologies, 2002, Adelboden, Switzerland

Abstract

Ultrashort pulses appear very promising for material removal with ultra high precision. Initial investigations showed, however, several unexpected quality problems such as formation of recast, ripples and irregular hole shapes even in the femtosecond pulse regime. After describing the problems, this contribution will present some progress in fundamental understanding of the ultrafast ablation process. On the basis of this knowledge technical means have been developed allowing to achieve an unprecedented level of accuracy at acceptable expenses. The latter being strongly influenced by the shortness of the laser pulse, a comparison between pico- and femto-second regime will be presented.

Citation Download Citation

Friedrich Dausinger, Helmut Hugel, and Vitali I. Konov "Micromachining with ultrashort laser pulses: from basic understanding to technical applications", Proc. SPIE 5147, ALT'02 International Conference on Advanced Laser Technologies, (14 November 2003); https://doi.org/10.1117/12.537496

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