Design and fabrication of guided-mode resonant grating filter with antireflection structured surface

Hiroshi Toyota; Akio Mizutani; Hisao Kikuta; Koichi Iwata

doi:10.1117/12.505407

29 December 2003 Design and fabrication of guided-mode resonant grating filter with antireflection structured surface

Hiroshi Toyota, Akio Mizutani, Hisao Kikuta, Koichi Iwata

Proceedings Volume 5184, Physics, Theory, and Applications of Periodic Structures in Optics II; (2003) https://doi.org/10.1117/12.505407
Event: Optical Science and Technology, SPIE's 48th Annual Meeting, 2003, San Diego, California, United States

Abstract

We have proposed a new structure of guided-mode resonant grating (GMRG) filter with low sideband reflectance. This GMRG filter consists of a high refractive index thin-film on an antireflection structured (ARS) surface called “moth-eye structure”. This antireflective GMRG filter is valid for reducing reflection of nonresonant light waves in a wide spectral range. This antireflective GMRG filter is valid for reducing reflection of nonresonant light waves in a wide spectral range. The resonant reflection of this new filter was investigated by numerical calculation based on an electromagnetic grating analysis. In the case of an antireflective GMRG filter with aspect ratio 2, the sideband reflectance for nonresonant light waves was lower than 0.5% for TM polarized light in the wide-wavelength range. We have fabricated an antireflective GMRG filter. The triangular grating of fused silica for ARS surface was fabricated by reactive ion etching due to high-density fluorocarbon plasma with resist line patterns and chromium thin-film line patterns as etching masks. The fabricated antireflective GMRG filter was a period of 333 nm and a height of about 666 nm. The thickness of a TiO₂ thin-film deposited on the triangular grating was about 100 nm. Resonant peak was detected at wavelength of 680 nm, and peak intensity was 45%. Moreover, it was found that sideband reflectance was less than 4%.

Citation Download Citation

Hiroshi Toyota, Akio Mizutani, Hisao Kikuta, and Koichi Iwata "Design and fabrication of guided-mode resonant grating filter with antireflection structured surface", Proc. SPIE 5184, Physics, Theory, and Applications of Periodic Structures in Optics II, (29 December 2003); https://doi.org/10.1117/12.505407

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available