Surface characterization of optically polished CaF2 crystal by quasi-Brewster-angle technique

Jue Wang; Robert L. Maier; John H. Bruning

doi:10.1117/12.507180

4 November 2003 Surface characterization of optically polished CaF₂ crystal by quasi-Brewster angle technique

Jue Wang, Robert L. Maier, John H. Bruning

Proceedings Volume 5188, Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies; (2003) https://doi.org/10.1117/12.507180
Event: Optical Science and Technology, SPIE's 48th Annual Meeting, 2003, San Diego, California, United States

Abstract

With the development of 157nm laser lithography, calcium fluoride (CaF₂) has become a very important material for excimer laser components. The optical performance of CaF₂ at 157nm is strongly related to its surface quality. By analyzing the phase change of reflected p-polarization near the Brewster angle at wavelengths between 150nm and 1000nm, a quasi-Brewster angle technique (qBAT) was developed to characterize the surface quality of CaF₂. This technique suggests that the slope of the quasi-Brewster angle is dominated by top surface roughness, while the displacement of the quasi-Brewster angle is determined by subsurface damage. A simple model developed to describe the surface quality of CaF₂ includes both top surface and subsurface effects. The relationship between subsurface damage and quasi-Brewster angle shift was determined. Using an ultraviolet ozone (UVO) cleaning process, four surface characteristics, e.g., top surface roughness, top surface contamination, subsurface damage, and subsurface contamination could be distinguished.

Citation Download Citation

Jue Wang, Robert L. Maier, and John H. Bruning "Surface characterization of optically polished CaF₂ crystal by quasi-Brewster angle technique", Proc. SPIE 5188, Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies, (4 November 2003); https://doi.org/10.1117/12.507180

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