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Proceedings Article

Reliable determination of wavelength dependence of thin film refractive index

[+] Author Affiliations
Alexander V. Tikhonravov, Michael K. Trubetskov, Tatiana V. Amotchkina, Andrei A. Tikhonravov

Moscow State Univ. (Russia)

Detlev Ristau, Stefan Gunster

Laser Zentrum Hannover e.V. (Germany)

Proc. SPIE 5188, Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies, 331 (November 7, 2003); doi:10.1117/12.505554
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From Conference Volume 5188

  • Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies
  • Angela Duparre; Bhanwar Singh
  • San Diego, California, USA | August 03, 2003

abstract

Depending on the choice of thin film models and measurement data used for the characterization analysis one can obtain essentially different characterization results. It is especially difficult to reliably determine refractive index wavelength dependencies in the case of low accuracy measurement data. We consider possible approaches aimed to improve a stability of refractive index determination. The ways of the verification of characterization results are also discussed. Practical examples used to illustrate the proposed approaches are connected with the most difficult case of the determination of the refractive indices of fluoride films in the VUV spectral region.

© (2003) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

Alexander V. Tikhonravov ; Michael K. Trubetskov ; Tatiana V. Amotchkina ; Andrei A. Tikhonravov ; Detlev Ristau, et al.
"Reliable determination of wavelength dependence of thin film refractive index", Proc. SPIE 5188, Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies, 331 (November 7, 2003); doi:10.1117/12.505554; http://dx.doi.org/10.1117/12.505554


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