Deducing light scatter from AFM measurements

Cornelius Hahlweg; Thomas Rinder; Peter Thomsen-Schmidt; C. Groh; Hendrik Rothe

doi:10.1117/12.505016

16 October 2003 Deducing light scatter from AFM measurements

Cornelius Hahlweg, Thomas Rinder, Peter Thomsen-Schmidt, C. Groh, Hendrik Rothe

Proceedings Volume 5189, Surface Scattering and Diffraction III; (2003) https://doi.org/10.1117/12.505016
Event: Optical Science and Technology, SPIE's 48th Annual Meeting, 2003, San Diego, California, United States

Abstract

For the numerical prediction of the scattering behavior of arbitrary surfaces the use of a multi pole mthod is a potentially successful way. One reason is its direct addressing of the free space problem, which is primarily not possible with methods such as FEM. For purposes of verification with a reduced set of degrees of freedom the multi pole method is applied on gold plated blazed optical gratings, which are described as surfaces with one-dimensional height function and ideally conductive boundary, leading to a 2D-problem with a simplified matching of the boundary conditions. The geometry is deduced from AFM measurements, numerical results are compared with measurements. An outlook is given on further extensions of the multipole method to 3D-problems with arbitrary boundary conditions such as dielectric layers with losses.

Citation Download Citation

Cornelius Hahlweg, Thomas Rinder, Peter Thomsen-Schmidt, C. Groh, and Hendrik Rothe "Deducing light scatter from AFM measurements", Proc. SPIE 5189, Surface Scattering and Diffraction III, (16 October 2003); https://doi.org/10.1117/12.505016

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