An optical scan-calibration system in scanning near-field optical microscopy

Yunliang Wu; Hao Zhang; Keyi Wang

doi:10.1117/12.839647

1 December 2009 An optical scan-calibration system in scanning near-field optical microscopy

Yunliang Wu, Hao Zhang, Keyi Wang

Proceedings Volume 7506, 2009 International Conference on Optical Instruments and Technology: Optical Systems and Modern Optoelectronic Instruments; 75062P (2009) https://doi.org/10.1117/12.839647
Event: International Conference on Optical Instrumentation and Technology, 2009, Shanghai, China

Abstract

Scanning Probe Microscopes(SPM) use piezoelectric actuators to generate the scans. But the nonlinearities inherent in the piezoelectric actuators limit the usefulness of the instruments in precision metrology. This paper describes a simple optical beam displacement sensor that is used to accurately measure the (x,y) position of a piezoelectric tube scanner used in Scanning Near-field Optical Microscope(SNOM). As the nonlinearities is too complex to make up a simple math model, this paper use the Artificial neural network to Calibrate the nonlinearities.

Citation Download Citation

Yunliang Wu, Hao Zhang, and Keyi Wang "An optical scan-calibration system in scanning near-field optical microscopy", Proc. SPIE 7506, 2009 International Conference on Optical Instruments and Technology: Optical Systems and Modern Optoelectronic Instruments, 75062P (1 December 2009); https://doi.org/10.1117/12.839647

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