A 2D coplanar translation stage with synchronous XY position metrology for surface scanning measurement

Kaiyi Xian; Liping Zhou; Xiaojun Liu

doi:10.1117/12.885663

28 December 2010 A 2D coplanar translation stage with synchronous XY position metrology for surface scanning measurement

Kaiyi Xian, Liping Zhou, Xiaojun Liu

Author Affiliations +

Proceedings Volume 7544, Sixth International Symposium on Precision Engineering Measurements and Instrumentation; 75441L (2010) https://doi.org/10.1117/12.885663
Event: Sixth International Symposium on Precision Engineering Measurements and Instrumentation, 2010, Hangzhou, China

Abstract

A precise translation stage is important for surface topography measurement based on scanning method, for it provides precise measurement datum and accurate positioning of scanning points. In this paper, a 2-D coplanar translation stage with synchronous XY position metrology is developed for surface scanning measurement. The mechanical structure of this stage is designed to translate along X and Y directions based on a common plane, which improves the movement flatness of the sample table. For higher precise 2-D positioning metrology, a novel double cross diffraction grating measurement system is proposed, by which the XY position of the sample table can be measured synchronously.

Citation Download Citation

Kaiyi Xian, Liping Zhou, and Xiaojun Liu "A 2D coplanar translation stage with synchronous XY position metrology for surface scanning measurement", Proc. SPIE 7544, Sixth International Symposium on Precision Engineering Measurements and Instrumentation, 75441L (28 December 2010); https://doi.org/10.1117/12.885663

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