Paper
18 May 2009 Ambient humidity monitoring using a 1D photonic crystal sensor fabricated with glancing angle deposition
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Abstract
We present the design, fabrication, and characterization of a GLAD-fabricated photonic crystal sensor with a bandgap located in the visible optical spectrum. The photonic crystal is fabricated from TiO2 using electron-beam evaporation in a GLAD capable vacuum deposition system. Changes in humidity over a wide range (from 3% to 90% relative humidity) are detected by a colour change in the film due to movement of the photonic bandgap. The colour changes are quantified by measuring the transmittance of white light. Coupling the sensitivity of the film with a simple visual feedback system eliminates the need for complicated measurement techniques. This is desirable to minimize the cost and power consumption of the sensor device, making it amenable to large-scale production and deployment.
© (2009) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Matthew M. Hawkeye, Kathleen M. Krause, and Michael J. Brett "Ambient humidity monitoring using a 1D photonic crystal sensor fabricated with glancing angle deposition", Proc. SPIE 7356, Optical Sensors 2009, 73560G (18 May 2009); https://doi.org/10.1117/12.820731
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CITATIONS
Cited by 6 scholarly publications.
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KEYWORDS
Humidity

Sensors

Photonic crystals

Transmittance

Refractive index

Scanning electron microscopy

Ocean optics

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