Deposition of polymer barrier materials by resonant infrared pulsed laser ablation

S. M. Avanesyan; A. Halabica; S. L. Johnson; M. J. Kelley; J. M. Klopf; H. K. Park; K. E. Schriver; S. Singaravelu; R. F. Haglund Jr.

doi:10.1117/12.846417

23 February 2010 Deposition of polymer barrier materials by resonant infrared pulsed laser ablation

S. M. Avanesyan, A. Halabica, S. L. Johnson, M. J. Kelley, J. M. Klopf, H. K. Park, K. E. Schriver, S. Singaravelu, R. F. Haglund Jr.

Author Affiliations +

Proceedings Volume 7585, Laser-based Micro- and Nanopackaging and Assembly IV; 758507 (2010) https://doi.org/10.1117/12.846417
Event: SPIE LASE, 2010, San Francisco, California, United States

Abstract

We describe resonant infrared pulsed laser deposition (RIR-PLD) of cyclic olefin copolymer, a barrier and protective layer; for comparison, we describe RIR-PLD of polystyrene and poly(ethylene dioxythiophene) about which we already have significant knowledge. Film deposition based on resonant infrared laser ablation is a low-temperature process leading to evaporation and deposition of intact molecules. In this paper, we focus on deposition of this model barrier and protective material that is potentially useful in the fabrication of organic light emitting diodes. The films were characterized by scanning electron microscopy and Fourier-transform infrared spectroscopy. We also compared the properties of films deposited by a free electron laser and a picosecond optical parametric oscillator.

Citation Download Citation

S. M. Avanesyan, A. Halabica, S. L. Johnson, M. J. Kelley, J. M. Klopf, H. K. Park, K. E. Schriver, S. Singaravelu, and R. F. Haglund Jr. "Deposition of polymer barrier materials by resonant infrared pulsed laser ablation", Proc. SPIE 7585, Laser-based Micro- and Nanopackaging and Assembly IV, 758507 (23 February 2010); https://doi.org/10.1117/12.846417

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available