Picosecond laser patterning of NiCr thin film strain gages

Oliver Suttmann; Michael Gosselin; Ulrich Klug; Rainer Kling

doi:10.1117/12.840842

25 February 2010 Picosecond laser patterning of NiCr thin film strain gages

Oliver Suttmann, Michael Gosselin, Ulrich Klug, Rainer Kling

Proceedings Volume 7589, Frontiers in Ultrafast Optics: Biomedical, Scientific, and Industrial Applications X; 758914 (2010) https://doi.org/10.1117/12.840842
Event: SPIE LASE, 2010, San Francisco, California, United States

Abstract

This paper presents results of ablation experiments of NiCr layers with thicknesses ranging from 23nm to 246nm on Al₂O₃ substrates. Investigated parameters are fluence, number of pulses, film thickness and substrate roughness. The influence of the parameters on the removal threshold is analyzed in order to identify stable processing parameters. Patterned NiCr thin films as an essential component for the measurement of mechanical stress are required for the development of sputtered thin film strain gages. With this new approach strain sensors will be resistant against creeping or swelling through changing ambient conditions unlike conventional strain gages.

Citation Download Citation

Oliver Suttmann, Michael Gosselin, Ulrich Klug, and Rainer Kling "Picosecond laser patterning of NiCr thin film strain gages", Proc. SPIE 7589, Frontiers in Ultrafast Optics: Biomedical, Scientific, and Industrial Applications X, 758914 (25 February 2010); https://doi.org/10.1117/12.840842

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