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Proceedings Article

Polarization converted laser beams for micromachining applications

[+] Author Affiliations
Ulrich Klug, Jan F. Düsing, Rainer Kling

Laser Zentrum Hannover e.V. (Germany)

Takashi Sato

Photonic Lattice, Inc. (Japan)

Kunihiko Washio

Paradigm Laser Research Ltd. (Japan)

Proc. SPIE 7590, Micromachining and Microfabrication Process Technology XV, 759006 (February 16, 2010); doi:10.1117/12.842141
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From Conference Volume 7590

  • Micromachining and Microfabrication Process Technology XV
  • Mary Ann Maher; Jung-Chih Chiao; Paul J. Resnick
  • San Francisco, California | January 23, 2010

abstract

Radial and azimuthal polarizations have attracted new interest in the process development community due to improved beam propagation and absorption conditions in the ablation cavity. This paper presents our recent activities and results on polarization converted ultrashort laser pulses by use of segmented half-wave-plates for the generation of ripple structures with predetermined sub-patterns. The formation of ripples fabricated in metals, ceramics, and semiconductors is analyzed by the morphological investigation of the structures (spacing and orientation) as a function of the polarization state of the laser beam.

© (2010) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

Ulrich Klug ; Jan F. Düsing ; Takashi Sato ; Kunihiko Washio and Rainer Kling
"Polarization converted laser beams for micromachining applications", Proc. SPIE 7590, Micromachining and Microfabrication Process Technology XV, 759006 (February 16, 2010); doi:10.1117/12.842141; http://dx.doi.org/10.1117/12.842141


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