Micro-patternable hybrid nanocomposites with tailorable mechanical and thermomechanical properties

Carsten Becker-Willinger; Pamela Kalmes; Petra Herbeck-Engel; Michael Veith

doi:10.1117/12.841668

16 February 2010 Micro-patternable hybrid nanocomposites with tailorable mechanical and thermomechanical properties

Carsten Becker-Willinger, Pamela Kalmes, Petra Herbeck-Engel, Michael Veith

Proceedings Volume 7591, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics III; 75910G (2010) https://doi.org/10.1117/12.841668
Event: SPIE MOEMS-MEMS, 2010, San Francisco, California, United States

Abstract

A new type of cationically polymerizable organic-inorganic hybrid nanocomposite with micro-patternability and tailor able thermomechanical properties has been developed^[1]. The material has been built by co-condensation of 3-glycidyloxypropyl-triethoxysilane and phenyltriethoxysilane followed by subsequent mixing with oligomeric cycloaliphatic epoxy resin as organic co-monomer. Nanocomposite mixtures have been formed by dispersing silica nanoparticles with 15 nm particle size into the performed matrix sol. To achieve an almost homogeneous distribution of the nanoparticles over the matrix different surface modifiers have been applied on the silica surface. The resulting transparent mixtures have been applied on silicon substrates and have been UV-polymerized using a cationic photoinitiator. The mechanical and thermomechanical properties as well as the resolution of photo patterns have been followed in dependence of the nanoparticulate filler content and the type of surface modification. Photo patterns could be created with high edge steepness even for highly filled systems. The universal hardness increased from 145 MPa for the unfilled hybrid resin to 244 MPa for the system containing 30 wt.-% silica. The same nanocomposite system showed an elastic modulus of about 5090 MPa compared to the unfilled hybrid resin of 3380 MPa which indicates the high potential of these materials forming mechanically stable patterns.

Citation Download Citation

Carsten Becker-Willinger, Pamela Kalmes, Petra Herbeck-Engel, and Michael Veith "Micro-patternable hybrid nanocomposites with tailorable mechanical and thermomechanical properties", Proc. SPIE 7591, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics III, 75910G (16 February 2010); https://doi.org/10.1117/12.841668

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available