Laser direct writing of submicron lines using micro- and nanofiber pens

Feng Tian; Guoguang Yang; Jian Bai; Jianfeng Xu; Qiaofen Zhou

doi:10.1117/12.840603

16 February 2010 Laser direct writing of submicron lines using micro- and nanofiber pens

Feng Tian, Guoguang Yang, Jian Bai, Jianfeng Xu, Qiaofen Zhou

Proceedings Volume 7591, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics III; 75910M (2010) https://doi.org/10.1117/12.840603
Event: SPIE MOEMS-MEMS, 2010, San Francisco, California, United States

Abstract

In this paper, a novel direct writing technique using micro- and nanofiber pens is presented. The micro- and nanofiber pen serves as a tightly confined point source and it adopts micro touch mode in the process of writing. The energy distribution of direct writing model is analyzed by Three-Dimension Finite-Difference Time-Domain method. The lines with feature sizes down to 100 nm are experimentally achieved by this technique. Experiments also demonstrate that direct writing using micro- and nanofiber pens has some advantages: simple process, large writing area, and controllable width of lines. In addition, by altering writing direction of lines, complex submicron patterns can be fabricated.

Citation Download Citation

Feng Tian, Guoguang Yang, Jian Bai, Jianfeng Xu, and Qiaofen Zhou "Laser direct writing of submicron lines using micro- and nanofiber pens", Proc. SPIE 7591, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics III, 75910M (16 February 2010); https://doi.org/10.1117/12.840603

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KEYWORDS

Photoresist materials

Nanofibers

Finite-difference time-domain method

Microscopes

Scanning electron microscopy

Cameras

Waveguides

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