Optical system of nano-level vibration measurement by laser Doppler

Li-yan Li; Hua-lin Zeng; Yan Zhou

doi:10.1117/12.835549

29 August 2009 Optical system of nano-level vibration measurement by laser Doppler

Li-yan Li, Hua-lin Zeng, Yan Zhou

Proceedings Volume 7382, International Symposium on Photoelectronic Detection and Imaging 2009: Laser Sensing and Imaging; 738253 (2009) https://doi.org/10.1117/12.835549
Event: International Symposium on Photoelectronic Detection and Imaging 2009, 2009, Beijing, China

Abstract

Through the studying on the M-Z interferometer optical system, the authors give a strict contrast analysis of influence on the steadiness of optical system about optical power, polarization state of laser and optical feedback caused by different types of beam splitters was made. After adjusting and optimizing the optical system, the authors built a high a precision vibration measurement of optical system. The system is advantage at the nano-level vibration measurement, low energy loss and far measuring distance.

Citation Download Citation

Li-yan Li, Hua-lin Zeng, and Yan Zhou "Optical system of nano-level vibration measurement by laser Doppler", Proc. SPIE 7382, International Symposium on Photoelectronic Detection and Imaging 2009: Laser Sensing and Imaging, 738253 (29 August 2009); https://doi.org/10.1117/12.835549

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