Modeling, parameter estimation, and open-loop control of MEMS deformable mirrors

Curtis R. Vogel; Glenn A. Tyler; Yang Lu

doi:10.1117/12.846363

18 February 2010 Modeling, parameter estimation, and open-loop control of MEMS deformable mirrors

Curtis R. Vogel, Glenn A. Tyler, Yang Lu

Proceedings Volume 7595, MEMS Adaptive Optics IV; 75950E (2010) https://doi.org/10.1117/12.846363
Event: SPIE MOEMS-MEMS, 2010, San Francisco, California, United States

Abstract

We present a model for MEMS deformable mirrors (DMs) that couples a 2-dimensional, linear 4th order partial differential equation for the DM facesheet with linear spring models for the actuators. We estimate the parameters in this model using the method of output least squares, and we demonstrate the effectiveness of this approach with data from a 140-actuator MEMS test mirror produced at Boston University. A scheme for robust, computationally efficient open-loop control, which is based on this model, is also presented.

Citation Download Citation

Curtis R. Vogel, Glenn A. Tyler, and Yang Lu "Modeling, parameter estimation, and open-loop control of MEMS deformable mirrors", Proc. SPIE 7595, MEMS Adaptive Optics IV, 75950E (18 February 2010); https://doi.org/10.1117/12.846363

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