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Proceedings Article

Interferometric characterization of mono- and polycrystalline CVD diamond

[+] Author Affiliations
Maurizio Vannoni, Giuseppe Molesini

Istituto Nazionale di Ottica Applicata, CNR (Italy)

Silvio Sciortino, Stefano Lagomarsino

Univ. of Florence (Italy)

Paolo Olivero

Univ. of Turin (Italy)

Proc. SPIE 7389, Optical Measurement Systems for Industrial Inspection VI, 738931 (June 15, 2009); doi:10.1117/12.827535
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From Conference Volume 7389

  • Optical Measurement Systems for Industrial Inspection VI
  • Peter H. Lehmann
  • Munich, Germany | June 15, 2009

abstract

Mono and polycrystalline Chemical Vapor Deposited (CVD) diamond is a promising material for several advanced topics: microchips substrate, biological applications, UV and particle detection. Commercial CVD diamonds are available in small square size, commonly 3-5 millimeters side and 0.5-1.5 millimeters thickness. To improve diamond reliability for described applications, it is important to have a quality control on diamond samples, not only for electrical constants but also for optical characteristics and surface roughness. In this paper we present an optical characterization method based on interferometric instruments, to measure surface structure and internal homogeneity of mono ad polycrystalline commercial CVD diamonds, with measurement examples.

© (2009) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

Maurizio Vannoni ; Giuseppe Molesini ; Silvio Sciortino ; Stefano Lagomarsino and Paolo Olivero
"Interferometric characterization of mono- and polycrystalline CVD diamond", Proc. SPIE 7389, Optical Measurement Systems for Industrial Inspection VI, 738931 (June 15, 2009); doi:10.1117/12.827535; http://dx.doi.org/10.1117/12.827535


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