Fourier domain optical coherence tomography for high-precision profilometry

Samuel Lawman; Haida Liang

doi:10.1117/12.827518

7 July 2009 Fourier domain optical coherence tomography for high-precision profilometry

Samuel Lawman, Haida Liang

Proceedings Volume 7391, O3A: Optics for Arts, Architecture, and Archaeology II; 73910H (2009) https://doi.org/10.1117/12.827518
Event: SPIE Europe Optical Metrology, 2009, Munich, Germany

Abstract

A Fourier domain (FD) optical coherence tomography (OCT) system is shown to be capable of profilometry with two orders of magnitude better accuracy than the axial imaging resolution of the system. High precision OCT profilometry not only achieves similar accuracy as commercial white light interferometry based profilometers but is also capable of profilometry on complex subsurface structures with multiple interfaces of low reflectance. An accuracy of 55nm was achieved with a ThorLabs SROCT on a lab bench without special anti-vibration devices. This technique has the potential for a range of applications, such as high precision refractive index measurements and simultaneous dynamic monitoring of the interface structure of a drying varnish and the substrate.

Citation Download Citation

Samuel Lawman and Haida Liang "Fourier domain optical coherence tomography for high-precision profilometry", Proc. SPIE 7391, O3A: Optics for Arts, Architecture, and Archaeology II, 73910H (7 July 2009); https://doi.org/10.1117/12.827518

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